1Vozny, VI, 1Miroshnichenko, VI, 1Mordyk, SM, 1Nagorny, AG, 1Nagorny, DA, 1Storizhko, VYu., 1Shulga, DP
1Institute of Applied Physics, NAS of Ukraine, Sumy
Nauka innov. 2010, 6(5):38-44
https://doi.org/10.15407/scin6.05.038
Section: Scientific Basis of Innovation Activity
Language: Russian
Abstract: 
The results of investigations of two types of radio-frequency ion sources: helicon and multicusp versions with compact magnet systems are presented. The following paramenters of the sources were obtained: plasma density of 1011–9×1012 cm-3, beam current densities of 10-130 mA/cm2, brightness  100 A•m-2•rad-2•eV-1, energy spread 8-30 eV, RF power input into the plasma of 40-400 W and pressure of 2-10 mTorr.
Keywords: brightness, focused ion beam, helicon ion source, multicuspion source
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