High-brightness RF Ion Sources for Accelerator Applications

1Vozny, VI, 1Miroshnichenko, VI, 1Mordyk, SM, 1Nagorny, AG, 1Nagorny, DA, 1Storizhko, VYu., 1Shulga, DP
1Institute of Applied Physics, NAS of Ukraine, Sumy
Nauka innov. 2010, 6(5):38-44
https://doi.org/10.15407/scin6.05.038
Section: Scientific Basis of Innovation Activity
Language: Russian
Abstract: 
The results of investigations of two types of radio-frequency ion sources: helicon and multicusp versions with compact magnet systems are presented. The following paramenters of the sources were obtained: plasma density of 1011–9×1012 cm-3, beam current densities of 10-130 mA/cm2, brightness  100 A•m-2•rad-2•eV-1, energy spread 8-30 eV, RF power input into the plasma of 40-400 W and pressure of 2-10 mTorr.
Keywords: brightness, focused ion beam, helicon ion source, multicuspion source
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