Plant for Precision Ionic-plasma Formation of Carbon Nanotubes in the United Vacuum-Technological Cycle

1Rudenko, EМ, 1Korotash, IV, 1Semenyuk, VF, 2Shamrai, KP
1G.V. Kurdyumov Institute for Metal Physics, NAS of Ukraine, Kyiv
2Institute for Nuclear Research, NAS of Ukraine, Kyiv
Nauka innov. 2009, 5(5):5-8
https://doi.org/10.15407/scin5.05.005
Section: Scientific and Technical Innovative Projects of National Academy of Sciences of Ukraine
Language: Ukrainian
Abstract: 
The plant for ionic-plasma formation carbon nanotubes and other nanostructures is created. The plant contains highvacuumpump system, working gases letting system, helicon discharge chamber, drift chamber, vacuum-arc sources, power sources and monitoring system with a small-sized optical spectrometer. The plant integrates processes plasma-enhanced chemical vapour-phase deposition, plasma clearing and activation of a substrate surface, deposition of transitive adhesive layers and metal-catalyst, direct formation process of carbon nanostructure.
Keywords: carbon nanotube, helicon source, ionic-plasma technologies, vacuum plant, vacuum-arc source
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