1Rudenko, EМ, 1Korotash, IV, 1Semenyuk, VF, 2Shamrai, KP
1G.V. Kurdyumov Institute for Metal Physics, NAS of Ukraine, Kyiv
2Institute for Nuclear Research, NAS of Ukraine, Kyiv
Nauka innov. 2009, 5(5):5-8
https://doi.org/10.15407/scin5.05.005
Section: Scientific and Technical Innovative Projects of National Academy of Sciences of Ukraine
Language: Ukrainian
Abstract: 
The plant for ionic-plasma formation carbon nanotubes and other nanostructures is created. The plant contains highvacuumpump system, working gases letting system, helicon discharge chamber, drift chamber, vacuum-arc sources, power sources and monitoring system with a small-sized optical spectrometer. The plant integrates processes plasma-enhanced chemical vapour-phase deposition, plasma clearing and activation of a substrate surface, deposition of transitive adhesive layers and metal-catalyst, direct formation process of carbon nanostructure.
Keywords: carbon nanotube, helicon source, ionic-plasma technologies, vacuum plant, vacuum-arc source
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