Field Type Ion Injector

1Vozny, VI, 1Storizhko, VYu., 1Miroshnichenko, VI, 1Tokman, VV, 1Mironets, Ye.A, 1Batura, Ye.O
1Institute of Applied Physics, NAS of Ukraine, Sumy
Nauka innov. 2010, 6(5):72-76
Section: Scientific Basis of Innovation Activity
Language: Russian
To improve the spatial resolution of FIB systems, field type ion injector has been developed. Measurements of the injector parameters are performed on the high-vacuum stand with a residual pressure about 5 ⋅ 10-7 Pa. Ion injector consists of a needle-in-capillary type gas field ion source, focusing einzel lens and compact Wien filter with permanent magnets. The field ion source design provides the possibility of cooling the tungsten needle to a liquid nitrogen temperature. Currentvoltage characteristics of the ion source operating at room temperature have been measured. Ion field emission current up to (1-5)•10-12 A at 2-5 kV emission voltage is obtained.
Keywords: brightness, emission, focused ion beam, gas field ion source
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