Field Type Ion Injector

TitleField Type Ion Injector
Publication TypeJournal Article
Year of Publication2010
AuthorsVozny, VI, Storizhko, VYu., Miroshnichenko, VI, Tokman, VV, Mironets, Ye.A, Batura, Ye.O
Short TitleNauka innov.
DOI10.15407/scin6.05.072
Volume6
Issue5
SectionScientific Basis of Innovation Activity
Pagination72-76
LanguageRussian
Abstract
To improve the spatial resolution of FIB systems, field type ion injector has been developed. Measurements of the injector parameters are performed on the high-vacuum stand with a residual pressure about 5 ⋅ 10-7 Pa. Ion injector consists of a needle-in-capillary type gas field ion source, focusing einzel lens and compact Wien filter with permanent magnets. The field ion source design provides the possibility of cooling the tungsten needle to a liquid nitrogen temperature. Currentvoltage characteristics of the ion source operating at room temperature have been measured. Ion field emission current up to (1-5)•10-12 A at 2-5 kV emission voltage is obtained.
Keywordsbrightness, emission, focused ion beam, gas field ion source
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