Plant for Precision Ionic-plasma Formation of Carbon Nanotubes in the United Vacuum-Technological Cycle
Title | Plant for Precision Ionic-plasma Formation of Carbon Nanotubes in the United Vacuum-Technological Cycle |
Publication Type | Journal Article |
Year of Publication | 2009 |
Authors | Rudenko, EМ, Korotash, IV, Semenyuk, VF, Shamrai, KP |
Short Title | Nauka innov. |
DOI | 10.15407/scin5.05.005 |
Volume | 5 |
Issue | 5 |
Section | Scientific and Technical Innovative Projects of National Academy of Sciences of Ukraine |
Pagination | 5-8 |
Language | Ukrainian |
Abstract | The plant for ionic-plasma formation carbon nanotubes and other nanostructures is created. The plant contains highvacuumpump system, working gases letting system, helicon discharge chamber, drift chamber, vacuum-arc sources, power sources and monitoring system with a small-sized optical spectrometer. The plant integrates processes plasma-enhanced chemical vapour-phase deposition, plasma clearing and activation of a substrate surface, deposition of transitive adhesive layers and metal-catalyst, direct formation process of carbon nanostructure.
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Keywords | carbon nanotube, helicon source, ionic-plasma technologies, vacuum plant, vacuum-arc source |
References | 1. Nanotehnologii v jelektronike. Pod red. Ju.A. Chaplygina. Moskva: Tehnosfera, 2005 [in Russian].
2. Shinohara S., Shamrai K.P. Effect of electrostatic waves on a rf field penetration into highly collisional helicon plasmas. Thin Solid Films. 2002, 407(1-2): 215-220. https://doi.org/10.1016/S0040-6090(02)00041-X 3. Kral'kina E.A. Induktivnyj vysokochastotnyj razrjad nizkogo davlenija i vozmozhnosti optimizacii istochnikov plazmy na ego osnove. UFN. 2008, 178(5): 519-540 [in Russian]. |