Plant for Precision Ionic-plasma Formation of Carbon Nanotubes in the United Vacuum-Technological Cycle

TitlePlant for Precision Ionic-plasma Formation of Carbon Nanotubes in the United Vacuum-Technological Cycle
Publication TypeJournal Article
Year of Publication2009
AuthorsRudenko, EМ, Korotash, IV, Semenyuk, VF, Shamrai, KP
Short TitleNauka innov.
DOI10.15407/scin5.05.005
Volume5
Issue5
SectionScientific and Technical Innovative Projects of National Academy of Sciences of Ukraine
Pagination5-8
LanguageUkrainian
Abstract
The plant for ionic-plasma formation carbon nanotubes and other nanostructures is created. The plant contains highvacuumpump system, working gases letting system, helicon discharge chamber, drift chamber, vacuum-arc sources, power sources and monitoring system with a small-sized optical spectrometer. The plant integrates processes plasma-enhanced chemical vapour-phase deposition, plasma clearing and activation of a substrate surface, deposition of transitive adhesive layers and metal-catalyst, direct formation process of carbon nanostructure.
Keywordscarbon nanotube, helicon source, ionic-plasma technologies, vacuum plant, vacuum-arc source
References
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