Nauka innov. 2012, 8(2):23–25
https://doi.org/10.15407/scin8.02.023

Yu. V. Petrov
Saint-Petersburg State University, Interdisciplinary Resource Center for  «Nanotechnology», St.Petersburg, Russia.

Scanning Helium Ion Microscope

Section: The World of Innovations
Language: Russian
Abstract: This article describes the experience of using helium microscope ORION (Carl Zeiss) at the Interdisciplinary Resource Center of «Nanotechnology» (St.Petersburg, Russia). Author discusses the formation and stability of helium single atom source, the processes of interaction of helium ions with the investigated substance, describes the possibility of applying helium ion microscopy and lithography.
Key words: helium ion microscope, single atom source, high resolution.

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