10 (2) 08
Nauka innov. 2014, 10(2):55-60
https://doi.org/10.15407/scin10.02.055
S.V. Niemova
“INTERO” Ltd., Kyiv
Sample Preparation for TEM and FESEM: New Generation Coaters from Leica Microsystems
Section: The World of Innovations
Language: Russian
Abstract: The article informs about new desktop coaters for ap p lication of conductive layers in vacuum from Leica Mic ro systems. There are information about technical data and field of application of the coaters.
Key words: nanotechnology, electron microscopy, microstructure analysis, replica, automatic control, vacuum level.
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